KOREA TUNGSTEN CO.,LTD

Ion Implanter Parts

Tungsten and molybdenum boats and crucibles for vacuum deposition and high-temperature melting. They are used where the vessel must not react with molten metal, and are built to your required shape and capacity.

3,422 °CMelting point of tungstenIt withstands arc heat

99.95 % +Material purityIt reduces wafer contamination

To drawingShape machiningChamber · slit · electrode

ConsumablesReplacement intervalBy equipment conditions

3,422 °CMelting point of tungstenIt withstands arc heat

99.95 % +Material purityIt reduces wafer contamination

To drawingShape machiningChamber · slit · electrode

ConsumablesReplacement intervalBy equipment conditions

Applied parts

Used as the evaporation source in vacuum coaters, the melting crucible in high-temperature furnaces and the vessel in crystal growth equipment. Material and shape are designed around what it will hold and at what temperature.

No photos registered100 %Scroll to zoom · drag to pan

MaterialTungsten (W) · Molybdenum (Mo)

Purity99.95 % and above

ProductionPrecision machining

GeometryChamber · slit · electrode

SurfacePolished optional

Service environmentPlasma · high vacuum

Geometry, dimensions and surface are set by the equipment specification. Tell us the drawing or the existing part and we will confirm and reply.

No products added

No photos registered100 %Scroll to zoom · drag to pan

MaterialTungsten (W) · Molybdenum (Mo)

Purity99.95 % and above

ProductionPrecision machining

GeometryChamber · slit · electrode

SurfacePolished optional

Service environmentPlasma · high vacuum

Geometry, dimensions and surface are set by the equipment specification. Tell us the drawing or the existing part and we will confirm and reply.

No products added

KEY FEATURES

The wear rate sets the uptime

Parts that wear fast mean the equipment stops often.

The material and surface where the arc and ion bombardment land set the replacement interval.

Arc and sputter resistance

Arc & Sputter Resistance

It withstands arcing and ion bombardment, slowing wear and extending the replacement interval.

Low contamination

Low Contamination

High-purity material reduces the metal contamination that reaches the wafer.

Dimensional accuracy

Dimensional Accuracy

Slit width and electrode spacing govern the beam shape and current.

Melting points by material

Tungsten (W)3422

Molybdenum (Mo)2623

Stainless steel1450

Melting point °C. The higher the figure, the longer it withstands arc heat.

Why purity matters

When a source part is sputtered, that metal ends up in the wafer. Purity is the contamination level.

Replacement interval

As a consumable it is often reordered with the geometry reproduced exactly. We keep the drawing on file.

KEY FEATURES

The wear rate sets the uptime

Parts that wear fast mean the equipment stops often.

The material and surface where the arc and ion bombardment land set the replacement interval.

Arc and sputter resistance

Arc & Sputter Resistance

It withstands arcing and ion bombardment, slowing wear and extending the replacement interval.

Low contamination

Low Contamination

High-purity material reduces the metal contamination that reaches the wafer.

Dimensional accuracy

Dimensional Accuracy

Slit width and electrode spacing govern the beam shape and current.

Melting points by material

Tungsten (W)3422

Molybdenum (Mo)2623

Stainless steel1450

Melting point °C. The higher the figure, the longer it withstands arc heat.

Why purity matters

When a source part is sputtered, that metal ends up in the wafer. Purity is the contamination level.

Replacement interval

As a consumable it is often reordered with the geometry reproduced exactly. We keep the drawing on file.

3,422°CMelting point of tungsten

99.95% +Material purity

DrawingbasisMachined geometry

3,422°CMelting point of tungsten

99.95% +Material purity

DrawingbasisMachined geometry

DESIGN PRECISION

Dimensions set to the equipment

In a source part, dimensions and surface are what distinguish the product.

In the same part, changing the slit width and the surface changes the beam current and the service life.

Drawingbasis

Machined geometry

Slit width and electrode spacing are held as drawn.

Polishinggrade

Surface condition

The grade is raised to reduce particles.

W · Mochoice

Material selection

Tungsten where the arc load is heavy, molybdenum where machinability is needed.

We do not pick a specification, we develop it with you. (Give us the equipment model and the replacement interval, and we will work out the material with you.)

DESIGN PRECISION

Dimensions set to the equipment

In a source part, dimensions and surface are what distinguish the product.

In the same part, changing the slit width and the surface changes the beam current and the service life.

Drawingbasis

Machined geometry

Slit width and electrode spacing are held as drawn.

Polishinggrade

Surface condition

The grade is raised to reduce particles.

W · Mochoice

Material selection

Tungsten where the arc load is heavy, molybdenum where machinability is needed.

We do not pick a specification, we develop it with you. (Give us the equipment model and the replacement interval, and we will work out the material with you.)

APPLICATIONS

Applications

The fields where ion implanter parts are used. Geometry differs by position.

Arc chamberThe chamber body and internal wall parts where the plasma is generated.

Source slitsUsed as the extraction slits and electrodes that draw out the beam.

RepellerUsed as the electrode part that reflects electrons.

Filament supportsUsed as the support parts that hold the filament.

Beam line partsUsed as shielding and aperture parts along the beam path.

Replacement partsWe reproduce the consumables of existing equipment to drawing.

Arc chamberextraction slitsrepellerbeam line

APPLICATIONS

Applications

The fields where ion implanter parts are used. Geometry differs by position.

Arc chamberThe chamber body and internal wall parts where the plasma is generated.

Source slitsUsed as the extraction slits and electrodes that draw out the beam.

RepellerUsed as the electrode part that reflects electrons.

Filament supportsUsed as the support parts that hold the filament.

Beam line partsUsed as shielding and aperture parts along the beam path.

Replacement partsWe reproduce the consumables of existing equipment to drawing.

Arc chamberextraction slitsrepellerbeam line

LEAD TIME

Fabrication and Lead Time

This product is made to your drawing. Here is the process, step by step.

STEP 01

Drawing received

Send us the part drawing, equipment model, position of use and replacement interval.

Reply within 1 day

STEP 02

Specification review

We review the material and machining method and confirm assembly tolerances.

2 – 4 days

STEP 03

Precision machining

Machined to the dimensions on the drawing with slit and hole positions matched.

By agreement, depending on the production schedule

STEP 04

Inspection · delivery

Dimensions are measured, the part is cleaned, and it ships with a test report. Repeat orders to the same drawing skip the review stage.

By agreement, depending on the production schedule

Minimum quantity

From 1 piece

Varies with geometry and tolerances.

Standard lead time

About 3 – 4 weeks

From drawing approval. Tight tolerances add machining stages.

Supplied with it

Test report

Dimensional measurements are sent with the delivery.

LEAD TIME

Fabrication and Lead Time

This product is made to your drawing. Here is the process, step by step.

STEP 01

Drawing received

Send us the part drawing, equipment model, position of use and replacement interval.

Reply within 1 day

STEP 02

Specification review

We review the material and machining method and confirm assembly tolerances.

2 – 4 days

STEP 03

Precision machining

Machined to the dimensions on the drawing with slit and hole positions matched.

By agreement, depending on the production schedule

STEP 04

Inspection · delivery

Dimensions are measured, the part is cleaned, and it ships with a test report. Repeat orders to the same drawing skip the review stage.

By agreement, depending on the production schedule

Minimum quantity

From 1 piece

Varies with geometry and tolerances.

Standard lead time

About 3 – 4 weeks

From drawing approval. Tight tolerances add machining stages.

Supplied with it

Test report

Dimensional measurements are sent with the delivery.

HANDLING

Handling precautions

These apply to refractory metals in general. Service life depends heavily on how the parts are handled.

Do not touch the parts with bare hands after unpacking. Oil from fingerprints carbonizes at high temperature and becomes a contaminant.

The material is weak against impact and bending. Tungsten is brittle at room temperature and can crack if dropped.

Do not heat above 500°C in air; oxidation accelerates sharply. Always use the parts in a vacuum or an inert atmosphere.

Avoid rapid heating and cooling. On first use, we recommend pre-heating (aging) at low current.

Store indoors in a dry place and keep the moisture-barrier packaging intact.

If your installation or operating conditions are unusual, our engineers will review them in advance. Send a drawing or your process conditions and we will start by selecting the right material with you.