Semiconductor equipment parts
Semiconductor equipment parts
Semiconductor equipment parts
We deliver the temperature uniformity and cleanliness that ultra-high-temperature vacuum chambers demand in CVD, PVD, etching and ion implantation processes, through high-purity refractory metal machining.
We deliver the temperature uniformity and cleanliness that ultra-high-temperature vacuum chambers demand in CVD, PVD, etching and ion implantation processes, through high-purity refractory metal machining.
We deliver the temperature uniformity and cleanliness that ultra-high-temperature vacuum chambers demand in CVD, PVD, etching and ion implantation processes, through high-purity refractory metal machining.
Core Processes
We supply parts that go into every stage of ultra-high-temperature and vacuum heat treatment processes.
CVD — chemical vapor deposition
The temperature distribution of the susceptor and heater determines film uniformity. We design the heating pattern to the equipment structure.
PVD — physical vapor deposition
The target and heat shield structure govern deposition rate and chamber cleanliness. We supply them in high-purity material.
Etching
We handle in-chamber parts that require plasma resistance and low particle generation in plasma environments.
Ion implantation
We apply machined refractory metal parts in electrodes and shielding structures under high-voltage, high-vacuum conditions.
Main Supply Items
Select a card to open the detailed specification page for that product.
AlN Heater (Mo)
Creates temperature uniformity across the whole substrate inside CVD and etching chambers, raising yield.
Shield & Counterweight
Blocks chamber heat loss and limits the temperature rise of surrounding structures.
Tungsten Electrode (W · WCu)
Maintains discharge stability and dimensional accuracy in high-voltage environments.
Sputtering Target
High-purity targets that govern PVD deposition rate and film quality.
Custom Specifications · Machining Options
Beyond the standard range, we can adjust to your equipment conditions.
Terminal type
Terminal positions are changed to suit the equipment's wiring layout — center-concentrated, inner-outer split and others.
Voltage · power designed to order
Give us the target temperature and heating rate and we work back to the resistance and cross-section.
Custom machining from drawings
One drawing is enough; we hold the same tolerances from prototype to production.
Key Benefits
Temperature uniformity
Heating pattern design and thickness control reduce temperature variation across the whole substrate, raising yield.
Minimal particle contamination
High-purity raw material and surface treatment suppress contamination sources during the process.
Fine-pattern machining accuracy
Wire EDM and precision grinding deliver fine geometries within drawing tolerances.
Core Processes
We supply parts that go into every stage of ultra-high-temperature and vacuum heat treatment processes.
CVD — chemical vapor deposition
The temperature distribution of the susceptor and heater determines film uniformity. We design the heating pattern to the equipment structure.
PVD — physical vapor deposition
The target and heat shield structure govern deposition rate and chamber cleanliness. We supply them in high-purity material.
Etching
We handle in-chamber parts that require plasma resistance and low particle generation in plasma environments.
Ion implantation
We apply machined refractory metal parts in electrodes and shielding structures under high-voltage, high-vacuum conditions.
Main Supply Items
Select a card to open the detailed specification page for that product.
AlN Heater (Mo)
Creates temperature uniformity across the whole substrate inside CVD and etching chambers, raising yield.
Shield & Counterweight
Blocks chamber heat loss and limits the temperature rise of surrounding structures.
Tungsten Electrode (W · WCu)
Maintains discharge stability and dimensional accuracy in high-voltage environments.
Sputtering Target
High-purity targets that govern PVD deposition rate and film quality.
Custom Specifications · Machining Options
Beyond the standard range, we can adjust to your equipment conditions.
Terminal type
Terminal positions are changed to suit the equipment's wiring layout — center-concentrated, inner-outer split and others.
Voltage · power designed to order
Give us the target temperature and heating rate and we work back to the resistance and cross-section.
Custom machining from drawings
One drawing is enough; we hold the same tolerances from prototype to production.
Key Benefits
Temperature uniformity
Heating pattern design and thickness control reduce temperature variation across the whole substrate, raising yield.
Minimal particle contamination
High-purity raw material and surface treatment suppress contamination sources during the process.
Fine-pattern machining accuracy
Wire EDM and precision grinding deliver fine geometries within drawing tolerances.
Advanced material supply and machining,
a global material leader
From raw material to finished part, the best solution seen from your side.
Weekdays 9:00 AM – 5:30 PM (alternate Fridays until 4:00 PM; closed weekends and public holidays)
Advanced material supply and machining,
a global material leader
From raw material to finished part, the best solution seen from your side.
Weekdays 9:00 AM – 5:30 PM (alternate Fridays until 4:00 PM; closed weekends and public holidays)
KOREA TUNGSTEN CO.,LTD
KOREA TUNGSTEN CO.,LTD
Refractory metal supply and ultra-precision machining — core materials for semiconductor, display, defense, space, medical & radiation.
INNOMT LLC
INNOMT CO.,LTD
Korea Tungsten's official overseas division
Key industries served
Customer support
© 2026 Korea Tungsten Co., Ltd. All rights reserved. 83 Bideukbawi-gil, Jori-eup, Paju-si, Gyeonggi-do 10949, Korea (364-2 Osan-ri) +82-31-975-1717
© 2026 INNOMT Co., Ltd. All rights reserved. Unit A-1710, IS Biz Tower Hangang 3, 50 Eutteum-ro, Deogyang-gu, Goyang-si, Gyeonggi-do 10543, Korea +82-2-6408-4239
Privacy Policy
Terms of Use
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KOREA TUNGSTEN CO.,LTD
KOREA TUNGSTEN CO.,LTD
Refractory metal supply and ultra-precision machining — core materials for semiconductor, display, defense, space, medical & radiation.
INNOMT LLC
INNOMT CO.,LTD
Korea Tungsten's official overseas division
Key industries served
Customer support
© 2026 Korea Tungsten Co., Ltd. All rights reserved. 83 Bideukbawi-gil, Jori-eup, Paju-si, Gyeonggi-do 10949, Korea (364-2 Osan-ri) +82-31-975-1717
© 2026 INNOMT Co., Ltd. All rights reserved. Unit A-1710, IS Biz Tower Hangang 3, 50 Eutteum-ro, Deogyang-gu, Goyang-si, Gyeonggi-do 10543, Korea +82-2-6408-4239
Privacy Policy
Terms of Use
Cookie settings
KOREA TUNGSTEN CO.,LTD
KOREA TUNGSTEN CO.,LTD
Refractory metal supply and ultra-precision machining — core materials for semiconductor, display, defense, space, medical & radiation.
INNOMT LLC
INNOMT CO.,LTD
Korea Tungsten's official overseas division
Key industries served
Customer support
© 2026 Korea Tungsten Co., Ltd. All rights reserved. 83 Bideukbawi-gil, Jori-eup, Paju-si, Gyeonggi-do 10949, Korea (364-2 Osan-ri) +82-31-975-1717
© 2026 INNOMT Co., Ltd. All rights reserved. Unit A-1710, IS Biz Tower Hangang 3, 50 Eutteum-ro, Deogyang-gu, Goyang-si, Gyeonggi-do 10543, Korea +82-2-6408-4239
Privacy Policy
Terms of Use
Cookie settings