MOCVD heater
MOCVD heater
MOCVD heater
Tungsten and molybdenum boats and crucibles for vacuum deposition and high-temperature melting. They are used where the vessel must not react with molten metal, and are built to your required shape and capacity.
Tungsten and molybdenum boats and crucibles for vacuum deposition and high-temperature melting. They are used where the vessel must not react with molten metal, and are built to your required shape and capacity.
Tungsten and molybdenum boats and crucibles for vacuum deposition and high-temperature melting. They are used where the vessel must not react with molten metal, and are built to your required shape and capacity.
Applied parts
Applied parts
Used as the evaporation source in vacuum coaters, the melting crucible in high-temperature furnaces and the vessel in crystal growth equipment. Material and shape are designed around what it will hold and at what temperature.
Used as the evaporation source in vacuum coaters, the melting crucible in high-temperature furnaces and the vessel in crystal growth equipment. Material and shape are designed around what it will hold and at what temperature.
Pattern, zones and terminal positions are set by the chamber specification. Tell us the drawing or the service conditions and we will confirm and reply.
Pattern, zones and terminal positions are set by the chamber specification. Tell us the drawing or the service conditions and we will confirm and reply.
KEY FEATURES
The pattern sets the temperature distribution
Track width and spacing decide the variation across the whole wafer.
Element width and spacing are varied by zone to counter the temperature drop at the edge.
High-temperature stability
High Temperature Stability
Molybdenum 2,623 °C. It holds its shape without deforming at epitaxial growth temperatures.
Temperature uniformity
Temperature Uniformity
Element width and spacing are adjusted to reduce temperature variation across the whole susceptor.
Thermal cycling durability
Thermal Cycling
Stress is relieved before forming so that no cracks appear through repeated heating and cooling.
Melting points by material
Melting point °C. The higher the figure, the higher the process temperature it withstands.
Why uniformity is yield
When the edge temperature drops, the epitaxial layer thickness and composition change, and defects start at the wafer edge.
Multi-zone
Dividing power between zones lets the variation be brought back under control when the chamber conditions change.
KEY FEATURES
The pattern sets the temperature distribution
Track width and spacing decide the variation across the whole wafer.
Melting points by material
Melting point °C. The higher the figure, the higher the process temperature it withstands.
Element width and spacing are varied by zone to counter the temperature drop at the edge.
Molybdenum 2,623 °C. It holds its shape without deforming at epitaxial growth temperatures.
Element width and spacing are varied by zone to counter the temperature drop at the edge.
High-temperature stability
High Temperature Stability
Molybdenum 2,623 °C. It holds its shape without deforming at epitaxial growth temperatures.
Temperature uniformity
Temperature Uniformity
Element width and spacing are adjusted to reduce temperature variation across the whole susceptor.
Thermal cycling durability
Thermal Cycling
Stress is relieved before forming so that no cracks appear through repeated heating and cooling.
Melting points by material
Melting point °C. The higher the figure, the higher the process temperature it withstands.
Why uniformity is yield
When the edge temperature drops, the epitaxial layer thickness and composition change, and defects start at the wafer edge.
Multi-zone
Dividing power between zones lets the variation be brought back under control when the chamber conditions change.
DESIGN PRECISION
The pattern is designed to the chamber
In a heater, pattern and zone layout are what distinguish the product.
In the same heater, changing the track width and spacing changes the temperature distribution.
Pattern design
Width and spacing are set to the susceptor size and the target temperature.
Zone layout
Zones are divided where zone control is needed.
Material selection
Tungsten where the highest temperature is needed, molybdenum where machinability is.
We do not pick a specification, we develop it with you. (Give us the chamber dimensions and the target temperature, and we will work out the pattern design with you.)
DESIGN PRECISION
The pattern is designed to the chamber
In a heater, pattern and zone layout are what distinguish the product.
In the same heater, changing the track width and spacing changes the temperature distribution.
Pattern design
Width and spacing are set to the susceptor size and the target temperature.
Zone layout
Zones are divided where zone control is needed.
Material selection
Tungsten where the highest temperature is needed, molybdenum where machinability is.
We do not pick a specification, we develop it with you. (Give us the chamber dimensions and the target temperature, and we will work out the pattern design with you.)
APPLICATIONS
Applications
The fields where MOCVD heaters are used. Pattern and zones differ by process.
APPLICATIONS
Applications
The fields where MOCVD heaters are used. Pattern and zones differ by process.
LEAD TIME
Fabrication and Lead Time
This product is made to your drawing. Here is the process, step by step.
STEP 01
Drawing received
Send us the susceptor diameter, zone layout, rated power and gas conditions.
Reply within 1 daySTEP 02
Design review
We propose the zone division and pattern and review the temperature distribution.
3 – 5 daysSTEP 03
Pattern machining
The pattern is machined zone by zone and the terminal section reinforced.
By agreement, depending on the production scheduleSTEP 04
Inspection · delivery
Resistance and temperature variation are measured, and the part ships with a test report. Repeat orders to the same drawing skip the review stage.
By agreement, depending on the production scheduleMinimum quantity
From 1 piece
Varies with diameter and number of zones.
Standard lead time
About 4 – 6 weeks
From drawing approval. More zones add the design review period.
Supplied with it
Test report
Resistance and temperature variation measurements are sent with the delivery.
LEAD TIME
Fabrication and Lead Time
This product is made to your drawing. Here is the process, step by step.
Drawing received
Send us the susceptor diameter, zone layout, rated power and gas conditions.
From 1 piece
Varies with diameter and number of zones.
About 4 – 6 weeks
From drawing approval. More zones add the design review period.
Test report
Resistance and temperature variation measurements are sent with the delivery.
STEP 01
Drawing received
Send us the susceptor diameter, zone layout, rated power and gas conditions.
Reply within 1 daySTEP 02
Design review
We propose the zone division and pattern and review the temperature distribution.
3 – 5 daysSTEP 03
Pattern machining
The pattern is machined zone by zone and the terminal section reinforced.
By agreement, depending on the production scheduleSTEP 04
Inspection · delivery
Resistance and temperature variation are measured, and the part ships with a test report. Repeat orders to the same drawing skip the review stage.
By agreement, depending on the production scheduleMinimum quantity
From 1 piece
Varies with diameter and number of zones.
Standard lead time
About 4 – 6 weeks
From drawing approval. More zones add the design review period.
Supplied with it
Test report
Resistance and temperature variation measurements are sent with the delivery.
HANDLING
Handling precautions
These apply to refractory metals in general. Service life depends heavily on how the parts are handled.
01
01
Do not touch the parts with bare hands after unpacking. Oil from fingerprints carbonizes at high temperature and becomes a contaminant.
02
02
The material is weak against impact and bending. Tungsten is brittle at room temperature and can crack if dropped.
03
03
Do not heat above 500°C in air; oxidation accelerates sharply. Always use the parts in a vacuum or an inert atmosphere.
04
04
Avoid rapid heating and cooling. On first use, we recommend pre-heating (aging) at low current.
05
05
Store indoors in a dry place and keep the moisture-barrier packaging intact.
If your installation or operating conditions are unusual, our engineers will review them in advance. Send a drawing or your process conditions and we will start by selecting the right material with you.
If your installation or operating conditions are unusual, our engineers will review them in advance. Send a drawing or your process conditions and we will start by selecting the right material with you.
If your installation or operating conditions are unusual, our engineers will review them in advance. Send a drawing or your process conditions and we will start by selecting the right material with you.
Advanced material supply and machining,
a global material leader
From raw material to finished part, the best solution seen from your side.
Weekdays 9:00 AM – 5:30 PM (alternate Fridays until 4:00 PM; closed weekends and public holidays)
Advanced material supply and machining,
a global material leader
From raw material to finished part, the best solution seen from your side.
Weekdays 9:00 AM – 5:30 PM (alternate Fridays until 4:00 PM; closed weekends and public holidays)
KOREA TUNGSTEN CO.,LTD
KOREA TUNGSTEN CO.,LTD
Refractory metal supply and ultra-precision machining — core materials for semiconductor, display, defense, space, medical & radiation.
INNOMT LLC
INNOMT CO.,LTD
Korea Tungsten's official overseas division
Key industries served
Customer support
© 2026 Korea Tungsten Co., Ltd. All rights reserved. 83 Bideukbawi-gil, Jori-eup, Paju-si, Gyeonggi-do 10949, Korea (364-2 Osan-ri) +82-31-975-1717
© 2026 INNOMT Co., Ltd. All rights reserved. Unit A-1710, IS Biz Tower Hangang 3, 50 Eutteum-ro, Deogyang-gu, Goyang-si, Gyeonggi-do 10543, Korea +82-2-6408-4239
Privacy Policy
Terms of Use
Cookie settings
KOREA TUNGSTEN CO.,LTD
KOREA TUNGSTEN CO.,LTD
Refractory metal supply and ultra-precision machining — core materials for semiconductor, display, defense, space, medical & radiation.
INNOMT LLC
INNOMT CO.,LTD
Korea Tungsten's official overseas division
Key industries served
Customer support
© 2026 Korea Tungsten Co., Ltd. All rights reserved. 83 Bideukbawi-gil, Jori-eup, Paju-si, Gyeonggi-do 10949, Korea (364-2 Osan-ri) +82-31-975-1717
© 2026 INNOMT Co., Ltd. All rights reserved. Unit A-1710, IS Biz Tower Hangang 3, 50 Eutteum-ro, Deogyang-gu, Goyang-si, Gyeonggi-do 10543, Korea +82-2-6408-4239
Privacy Policy
Terms of Use
Cookie settings
KOREA TUNGSTEN CO.,LTD
KOREA TUNGSTEN CO.,LTD
Refractory metal supply and ultra-precision machining — core materials for semiconductor, display, defense, space, medical & radiation.
INNOMT LLC
INNOMT CO.,LTD
Korea Tungsten's official overseas division
Key industries served
Customer support
© 2026 Korea Tungsten Co., Ltd. All rights reserved. 83 Bideukbawi-gil, Jori-eup, Paju-si, Gyeonggi-do 10949, Korea (364-2 Osan-ri) +82-31-975-1717
© 2026 INNOMT Co., Ltd. All rights reserved. Unit A-1710, IS Biz Tower Hangang 3, 50 Eutteum-ro, Deogyang-gu, Goyang-si, Gyeonggi-do 10543, Korea +82-2-6408-4239
Privacy Policy
Terms of Use
Cookie settings